Introduction to Micro-Electro-Mechanical Systems (MEMS)
Summer 2006
INSTRUCTOR: Dr. LaVern A. Starman, Ph.D.
Room 304a Bldg.640, Phone 255-3636 x4618, Fax 937-255-2791
TIME/LOCATION – Class: T,R 4:10 - 5:50, Rm. RC 154
TEXT: G. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1998,
ISBN: 0-07-290722-3.
OTHER REFERENCES
This course covers the history,
design, and fabrication of micro-electro-mechanical systems (MEMS), and the
basic operating theory of selected MEMS transducers. Typical fabrication
methods covered include surface micromachining, bulk micromachining, and
micromolding. A broad range of MEMS
transducers (sensors or actuators) and applications will be surveyed. This course will include a laboratory where
students will design classical MEMS devices, to include: electrostatic
actuators, electro-thermal actuators, multilayer misfit-strain actuators, and
hinged structures. MEMS device designs
will be prepared using the computer aided drawing program “L-Edit”, and possibly
be submitted for fabrication in a commercial polycrystalline silicon surface
micromachining process.
COURSE OBJECTIVES:
Each student will:
GRADING: Homework 40%
Mid-Term Exam 20%
Class Project 20%
Lab Project 20%
COURSE OUTLINE:
|
Week |
|
Topic |
1. |
12-16 Jun |
Class |
Introduction to MEMS and Fabrication ( |
2. |
19-23 Jun |
Class |
Fabrication ( |
|
|
Lab |
Introduction to L-Edit – Self Study |
3. |
26-30 Jun |
Class |
Fabrication ( |
|
|
Lab |
Designs in MUMPs: Multilayer Misfit-Strain
Actuators |
|
|
Assign |
Pick Project Topic due 30 Jun |
4. |
3-7 Jul |
Class |
Mechanical Transducers ( |
|
|
Lab |
Designs in MUMPs: Electrostatic Actuators -
Micromirror |
5. |
10-14 Jul |
Class |
Mechanical Transducers ( |
|
|
Lab |
Designs in MUMPs: Electrothermal Actuators Thermal
Actuator |
6. |
17-21 Jul |
Class |
Selected Transducers ( |
|
|
Lab |
Designs in MUMPs: Project designs |
7. |
24-28 Jul |
Class |
Selected Transducers ( |
|
|
Lab |
Designs in MUMPs: Systems Design – Putting
it all together |
8. |
31 Jul-4 Aug |
Class |
Selected Transducers ( |
|
|
Lab |
Final Lab Designs Due in lab |
9. |
7-11 Aug |
Class |
Selected Transducers ( |
10. |
14-18 Aug |
Class |
Finals Week: Packaging, Assembly, and Harsh Environments |
|
|
Assign |
Final Report and Final Presentation due in
class, electronic and hard copy (Date & Time TBD) |
ADDITIONAL
COMMENTS:
·
If any homework
problems require numerical solutions – attach hardcopy code.
·
Use one side of
paper only.
·
Include the
following information on first page, top right corner, of any assignment:
Your M. Name
Dr. Starman
Assignment # (i.e. Homework 3, Midterm Exam, etc.)
Date (i.e. 12 Jun 06)
PROJECTS:
Class Project (Graduate Students)
Choose a topic based on your work or student research. Perform a literature search, and find papers
that describe MEMS applications related to your topic. Write a
final report summarizing your findings, and present your findings during finals
week. Your report and presentation
should include many representative figures drawn from the papers. The audience should feel like they are
“up-to-date” on what is going on, concerning your topic, in MEMS.
You will become the class expert on your
topic. Part of your final report and
presentation should also be a description (including figures of the layout and
3D models) of a simple polyMUMPs design, you made, related to your topic.
The final report is due as a hard copy and electronic
version. The format of your final report
must include 1 inch margins all around and 12 pt font. Figure, table, literature captions, and
references should be formatted like the format in the IEEE/ASME Journal of
Microelectromechanical Systems.
Your presentation will be
conducted using Power Point and a computer projector. The electronic version of your presentation
is also due. The presentation will be
placed on the laptop at presentation time.
Class Project (Under Graduate
Students)
Choose a topic based on your interest or student research. Find a journal article about your device and write a one page summary covering the
key device characteristics. In addition, draw a 3D or multiple 2D images of the
device you’re presenting in L-edit. Report due during finals week. Note: Provide a copy of the journal article
with your final report. No presentation required.
Lab Project
Through the use of L-edit, each
student will design the following types of MEMS structures:
1.
Arrays of
electrostatic actuators
2.
Arrays
electro-thermal actuators
3.
Arrays of multilayer
misfit-strain structures
4.
Designs relating
to the final project
The exact styles of your MEMS designs
are up to you. However, keep in mind the
simplicity of the device geometry as this will help keep your analytical
and numerical models simple, and simplicity of arrangement and smart designs
can make measurements easier. A question
to ask yourself is, “How will the deflections be measured?” Make sure your designs promote ease of
measurement.