Wright State University

 

Introduction to Micro-Electro-Mechanical Systems (MEMS)

Summer 2006

 

 

INSTRUCTOR:         Dr. LaVern A. Starman, Ph.D.

Room 304a Bldg.640, Phone 255-3636 x4618, Fax 937-255-2791

                                    E-mail: lavern.starman@afit.edu

 

TIME/LOCATION –    Class: T,R  4:10 - 5:50, Rm. RC 154

 

TEXT: G. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1998,

                        ISBN: 0-07-290722-3.

 

OTHER REFERENCES

  1. S. D. Senturia, Microsystem Design, Kluwer Academic Publishers, 2001, ISBN: 0-7923-7246-8.
  2. M. Madou, Fundamentals of Microfabrication, CRC Press, 2nd ed., 2002.
  3. M. Gad-el-Hak, The MEMS Handbook, CRC Press, 2002, ISBN: 0-8493-0077-0.
  4. W. S. Trimmer, Micromechanics and MEMS Classic and Seminal Papers to 1990, IEEE Press, 1997, ISBN: 0-7803-1085-3.
  5. J. W. Gardner, V. K. Varadan, O. O. Awadelkarim, Microsensors MEMS and Smart Devices, 2001, ISBN: 0-471-86109-X.
  6. Sami Franssila, Introduction to Microfabrication, 2004, ISBN 0470851058

 

COURSE DESCRIPTION:

                This course covers the history, design, and fabrication of micro-electro-mechanical systems (MEMS), and the basic operating theory of selected MEMS transducers. Typical fabrication methods covered include surface micromachining, bulk micromachining, and micromolding.  A broad range of MEMS transducers (sensors or actuators) and applications will be surveyed.  This course will include a laboratory where students will design classical MEMS devices, to include: electrostatic actuators, electro-thermal actuators, multilayer misfit-strain actuators, and hinged structures.  MEMS device designs will be prepared using the computer aided drawing program “L-Edit”, and possibly be submitted for fabrication in a commercial polycrystalline silicon surface micromachining process.

 

COURSE OBJECTIVES:

                Each student will:

  1. Demonstrate an advanced understanding of the concepts and principles of the course topics listed in the outline below
  2. Have a state-of-the-art understanding of a specific MEMS research topic of their choosing and a broad understanding of the MEMS field
  3. Be able to architect designs of MEMS using appropriate micromachining techniques

 

 

GRADING:    Homework                               40%

                        Mid-Term Exam                       20%

                        Class Project                            20%

                        Lab Project                              20%

 

 

COURSE OUTLINE:

 

 

Week

 

Topic

1.

12-16 Jun

Class

Introduction to MEMS and Fabrication (Ch. 1 & 2)

2.

19-23 Jun

Class

Fabrication (Ch. 2)

 

 

Lab

Introduction to L-Edit – Self Study

3.

26-30 Jun

Class

Fabrication (Ch. 2)

 

 

Lab

Designs in MUMPs: Multilayer Misfit-Strain Actuators

 

 

Assign

Pick Project Topic due 30 Jun

4.

3-7 Jul

Class

Mechanical Transducers (Ch. 3)

 

 

Lab

Designs in MUMPs: Electrostatic Actuators - Micromirror

5.

10-14 Jul

Class

Mechanical Transducers (Ch. 3)

 

 

Lab

Designs in MUMPs: Electrothermal Actuators  Thermal Actuator

6.

17-21 Jul

Class

Selected Transducers (Ch. 4)

 

 

Lab

Designs in MUMPs: Project designs

7.

24-28 Jul

Class

Selected Transducers (Ch. 4)

 

 

Lab

Designs in MUMPs: Systems Design – Putting it all together

8.

31 Jul-4 Aug

Class

Selected Transducers (Ch. 6 & 7)

 

 

Lab

Final Lab Designs Due in lab

9.

7-11 Aug

Class

Selected Transducers (Ch. 8 & 9)

10.

14-18 Aug

Class

Finals Week: Packaging, Assembly, and Harsh Environments

 

 

Assign

Final Report and Final Presentation due in class, electronic and hard copy (Date & Time TBD)

 

ADDITIONAL COMMENTS:

  • Homework collaboration in obtaining resources and solution methods is encouraged. 
  • Homework collaboration in working the problems is prohibited.
  • Collaboration of any kind on final report, presentation, and lab designs is encouraged!
  • Assignments be neat, orderly, and include units (e.g. eV, nm, atoms/cm3, “unitless,” etc.).
  • Assignments be concise and documented – use referencing wherever possible.
  • Derivations must be complete, yet concise – show only cleaned up success.
  • Enclose final answer in a   box   where appropriate.

·         If any homework problems require numerical solutions – attach hardcopy code.

·         Use one side of paper only.

·         Include the following information on first page, top right corner, of any assignment:

 

Your M. Name

Dr. Starman

Assignment # (i.e. Homework 3, Midterm Exam, etc.)

Date (i.e. 12 Jun 06)

 

 

 

 

 

 

 

 

PROJECTS:

Class Project (Graduate Students)

                Choose a topic based on your work or student research.  Perform a literature search, and find papers that describe MEMS applications related to your topic.  Write a final report summarizing your findings, and present your findings during finals week.  Your report and presentation should include many representative figures drawn from the papers.  The audience should feel like they are “up-to-date” on what is going on, concerning your topic, in MEMS.  You will become the class expert on your topic.  Part of your final report and presentation should also be a description (including figures of the layout and 3D models) of a simple polyMUMPs design, you made, related to your topic.

The final report is due as a hard copy and electronic version.  The format of your final report must include 1 inch margins all around and 12 pt font.  Figure, table, literature captions, and references should be formatted like the format in the IEEE/ASME Journal of Microelectromechanical Systems.

                Your presentation will be conducted using Power Point and a computer projector.    The electronic version of your presentation is also due.  The presentation will be placed on the laptop at presentation time.

 

Class Project (Under Graduate Students)

                Choose a topic based on your interest or student research.  Find a journal article about your device and write a one page summary covering the key device characteristics. In addition, draw a 3D or multiple 2D images of the device you’re presenting in L-edit. Report due during finals week.  Note: Provide a copy of the journal article with your final report. No presentation required.

 

Lab Project

                Through the use of L-edit, each student will design the following types of MEMS structures:

1.        Arrays of electrostatic actuators

2.        Arrays electro-thermal actuators

3.        Arrays of multilayer misfit-strain structures

4.        Designs relating to the final project

                The exact styles of your MEMS designs are up to you.  However, keep in mind the simplicity of the device   geometry as this will help keep your analytical and numerical models simple, and simplicity of arrangement and smart designs can make measurements easier.  A question to ask yourself is, “How will the deflections be measured?”  Make sure your designs promote ease of measurement.